Shimadzu EI-D203M Turbomolecular Pump Controller

Product Manual：

Shimadzu EI-D203M Turbomolecular Pump Controller
Shimadzu EI-D203M is a driving control unit for Shimadzu molecular pumps, commonly used in semiconductor vacuum equipment
Accurate regulation of molecular pump speed for smooth operation
Real time monitoring of pump body temperature, current, and vacuum status
Equipped with multiple protections against overcurrent, overheating, and overload
Built in fault alarm, quickly indicating abnormal problems
Metal shielding shell, resistant to workshop electromagnetic interference
The communication interface can be connected to the main control system of the device
The start-up and deceleration processes are controllable, reducing pump losses
Compact size, cabinet installation saves space

Wide adaptation voltage, suitable for factory power supply environment
Dustproof design, in compliance with the standards for use in cleanrooms
Power on self-test, pre check for circuit faults
Modular internal components for easy maintenance and replacement
Excellent heat dissipation structure, low heat generation after long-term operation
Operating parameters can be stored and adapted to different processes
Standard installation size, direct replacement of spare parts of the same model
In summary, the Shimadzu EI-D203M turbomolecular pump controller has stable control and complete protection, making it a core driving spare part for vacuum process equipment

Product detailed pictures：

EI-D203M

product video

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