AMAT 0010-013878 RF Matcher
Product Manual：
1、 Basic Information
Manufacturer: Applied Materials
Part number: 0010-013878 (commonly labeled as 0010-013878 Rev. xx)
Type: Automatic Impedance Matching Network (RF Match Box)
Applicable machines: AMAT Endura, Centura platform PVD chambers (Preclean II/E, PCI/E)
Function: Automatically matches RF power supply and plasma load impedance (standard 50 Ω) at 13.56MHz, maximizing power transmission and reducing reflection (VSWR).
2、 Core electrical parameters (typical values of the same series)
Working frequency: 13.56MHz ± 5%
Power Capacity: Continuous 3kW/Peak 5kW
Impedance matching range: 10-2000 Ω, automatic matching accuracy ± 0.1 Ω
Standing Wave Ratio (VSWR): Normal operating condition ≤ 1.5:1
RF interface: 7/16 DIN coaxial (input/output)
Control interface: DB25 (I/O, RS-232 communication)
Cooling method: Water cooling (flow rate ≥ 6L/min, Δ T<5 ℃)
3、 Structure and Environment
Form: Standard rack mounted (metal shielded chassis, anti electromagnetic interference)
Cooling: Water cooling+auxiliary air cooling, suitable for long-term continuous operation in clean rooms
Working temperature: 0-50 ° C; humidity<80% RH
Cleanliness level: Class 1 (ISO 14644), suitable for semiconductor cleanrooms
Protection mechanism: overcurrent, overvoltage, overtemperature, high reflected power, abnormal water cooling, interlock protection
Product detailed pictures：
0010-013878
product video
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