ضخم 0010-013878 RF Matcher

دليل المنتج：

1、 المعلومات الأساسية
الشركة المصنعة: Applied Materials
رقم الجزء: 0010-013878 (commonly labeled as 0010-013878 Rev. xx)
يكتب: Automatic Impedance Matching Network (RF Match Box)
Applicable machines: AMAT Endura, Centura platform PVD chambers (Preclean II/E, PCI/E)
Function: Automatically matches RF power supply and plasma load impedance (standard 50 Ω) at 13.56MHz, maximizing power transmission and reducing reflection (VSWR).
2、 Core electrical parameters (typical values of the same series)
Working frequency: 13.56MHz ± 5%
Power Capacity: Continuous 3kW/Peak 5kW
Impedance matching range: 10-2000 Ω, automatic matching accuracy ± 0.1 Ω

Standing Wave Ratio (VSWR): Normal operating condition ≤ 1.5:1
RF interface: 7/16 DIN coaxial (input/output)
Control interface: DB25 (الإدخال/الإخراج, RS-232 communication)
Cooling method: Water cooling (flow rate ≥ 6L/min, Δ T<5 ℃)
3、 Structure and Environment
Form: Standard rack mounted (metal shielded chassis, مكافحة التدخل الكهرومغناطيسي)
Cooling: Water cooling+auxiliary air cooling, suitable for long-term continuous operation in clean rooms
درجة حرارة العمل: 0-50 درجة مئوية; رطوبة<80% RH
Cleanliness level: Class 1 (ISO 14644), suitable for semiconductor cleanrooms
Protection mechanism: overcurrent, الجهد الزائد, overtemperature, high reflected power, abnormal water cooling, interlock protection

صور مفصلة للمنتج：

0010-013878

فيديو المنتج

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