ОГРОМНЫЙ 0010-013878 RF Matcher

Руководство по продукту：

1、 Basic Information
Manufacturer: Applied Materials
Номер детали: 0010-013878 (commonly labeled as 0010-013878 Rev. xx)
Тип: Automatic Impedance Matching Network (RF Match Box)
Applicable machines: AMAT Endura, Centura platform PVD chambers (Preclean II/E, PCI/E)
Функция: Automatically matches RF power supply and plasma load impedance (standard 50 Ω) at 13.56MHz, maximizing power transmission and reducing reflection (VSWR).
2、 Core electrical parameters (typical values of the same series)
Working frequency: 13.56MHz ± 5%
Power Capacity: Continuous 3kW/Peak 5kW
Impedance matching range: 10-2000 Ω, automatic matching accuracy ± 0.1 Ω

Standing Wave Ratio (VSWR): Normal operating condition ≤ 1.5:1
RF interface: 7/16 DIN coaxial (input/output)
Control interface: DB25 (I/O, RS-232 communication)
Cooling method: Water cooling (flow rate ≥ 6L/min, Δ T<5 ℃)
3、 Structure and Environment
Form: Standard rack mounted (metal shielded chassis, анти-электромагнитные помехи)
Cooling: Water cooling+auxiliary air cooling, suitable for long-term continuous operation in clean rooms
Рабочая температура: 0-50 °С; humidity<80% RH
Cleanliness level: Class 1 (ISO 14644), suitable for semiconductor cleanrooms
Protection mechanism: сверхток, перенапряжение, overtemperature, high reflected power, abnormal water cooling, interlock protection

Подробные фотографии продукта：

0010-013878

видео о продукте

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