DAIHEN 2L39-000158-V3 RF Automatic Matcher  

Product Manual：

DAIHEN 2L39-000158-V3 RF Automatic Matcher Product Features
Introduction: DAIHEN 2L39-000158-V3 is a specialized RF matching device for semiconductor etching and coating equipment, which can quickly adjust impedance and stabilize plasma processes.
Automatic real-time matching of load impedance, low RF transmission loss
Fast tuning response to adapt to dynamic changes in cavity impedance
Significantly reduce reflected power and protect the RF power supply host
Compatible with standard industrial RF frequencies and mainstream processes
Built in air-cooled heat dissipation, long-term full load operation without overheating
High voltage insulation protection to avoid RF leakage faults
Original factory standard interface, can directly replace spare parts of the same specification

Real time signal feedback for easy monitoring of machine system status
Compact modular body, saving installation space inside the device
Corrosion resistant internal components, resistant to process corrosive gas environments
Multiple fault protection, automatic shutdown warning for overheating and overcurrent
Low vibration during operation, does not interfere with precision semiconductor processes
Standardized communication protocol, integrated with TEL equipment control system
High durability adjustable capacitors and inductors, with longer maintenance cycles
The clean workshop is equipped with a sealed structure to prevent dust, water, and steam from entering
Conclusion: DAIHEN 2L39-000158-V3 has precise matching and complete protection, and is the core RF matching component of plasma semiconductor equipment.

Product detailed pictures：

2L39-000158-V3

product video

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