AMAT 0090-A1161 RF Controller  

Product Manual：

AMAT 0090-A1161 RF Controller
Introduction: AMAT 0090-A1161 is an original RF control board for material etching and deposition equipment, which controls RF power and impedance matching, and stably generates process plasma.
Real time adjustment of RF output power, high power control accuracy
Closed loop automatic impedance tuning to reduce reflected power loss
Real time collection of standing wave, current and other RF operation data
Built in multiple safety interlock protections for overheating, overcurrent, and short circuit
Signal isolation wiring to resist electromagnetic interference in the workshop
Standard backplane slot, direct insertion into the chassis without the need for adapter accessories
Built in fault self check, quick identification of abnormal codes to locate problems

Communication interface docking with the main control of the whole machine, uploading process parameters
Multi layer shielded PCB, RF signal transmission without clutter distortion
Industrial wide temperature element device, long-term stable operation around the cavity
Metal reinforced structure, earthquake resistant and dust-proof, suitable for clean workshops
Standardized wiring terminals for easy disassembly, replacement, and maintenance
Adapt to the mainstream semiconductor RF process frequency band of 13.56MHz
Original factory uniform size, same model can directly replace old parts
Factory loaded RF aging verification with good process consistency
Conclusion: AMAT 0090-A1161 has stable frequency control and fast matching, making it a core spare part for semiconductor thin film and etching cavity RF systems.

Product detailed pictures：

0090-A1161

product video

Other links

Berghof CE3CPU-1131 Controller Module
HONEYWELL 51153818-104 Controller Module
PHOENIX CONTACT 2864273 Temperature Sensor

Other links

PM511V16 3BSE011181R1 processor module
SB510 3BSE000860R1 module
SC510 3BSE003832R1 Communication Module