AMAT AS01225G-03 Input/Output Controller
Product Manual：
AMAT AS01225G-03 Input/Output Controller (MKS FI Flow Control Module)
Adapt to AMAT semiconductor thin film, etching equipment gas flow acquisition and valve drive
MKS original factory matching AMAT dedicated I/O flow controller, spare parts can be directly replaced
Multi channel analog+digital hybrid channel, collecting signals from flow meters and pressure sensors
Output control signals to regulate gas valves and stabilize the control of process gas ratios
Channel optoelectronic isolation, high and low voltage signals do not interfere with each other, anti cabinet electromagnetic interference
Integrate multiple hardware protections for overcurrent, overvoltage, and overheating to prevent module burnout
Metal integrated packaging, dustproof and moisture-proof, suitable for clean workshop working conditions
Built in signal filtering circuit to reduce data errors caused by airflow fluctuations
Standard industrial bus communication, real-time uploading of traffic parameters to the equipment master control
Panel status indicator light, intuitive identification of power, communication, and flow faults
Reserved testing interface, easy on-site calibration and troubleshooting operation
Industrial wide temperature element devices, stable operation in alternating cold and hot environments of cabinets
Seismic sealing structure, long-term vibration of the production line is not easy to cause signal drift
Support multi-stage gas process formula storage, precise process switching
Standardized wiring terminals, time-saving disassembly and maintenance, and reduced downtime
7 × 24-hour uninterrupted continuous production design, suitable for mass production lines
Summary: AMAT AS01225G-03 is a dedicated flow I/O controller for semiconductor equipment, responsible for gas signal acquisition and valve closed-loop control. It has strong stability and is a core fluid control spare part for thin film/etching chambers.
Product detailed pictures：
AS01225G-03
product video
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