FUJIKIN FCSP8202D-4CW2-F139BF39B Mass Flow Controller

Product Manual：

FUJIKIN FCSP8202D-4CW2-F139BF39B Mass Flow Controller
Introduction: Fuji Gold FCSP series semiconductor specific MFC, precise control of process gas flow.
1. FUJIKIN FCSP8202D-4CW2-F139BF39B has high flow control accuracy and stable process
2. Resistant to intake pressure fluctuations, flow rate values are less likely to drift
3. Fast response speed, complete flow adjustment within 0.5 seconds
4. Installation at any angle, placement does not affect measurement accuracy
5. Support multiple process gases and adapt to different processes
6. Equipped with built-in flow self check, quickly troubleshoot gas path faults
7. Built in overvoltage protection to prevent impact damage to components

8. Low emission stainless steel valve body, suitable for dust-free vacuum environment
9. Solid state sensing structure, capable of withstanding long-term vibrations of equipment
10. Standard communication interface, capable of directly connecting to the device host
11. Valve control regulation is stable, without interference from air flow pulses
12. Small integrated structure, saving cabinet installation space
13. Standard sealed joint, air path sealing without leakage
14. Low power consumption operation, low heat generation during long-term operation
15. Compatible with wafer etching and deposition equipment, easy to calibrate on the machine
Conclusion: FUJIKIN FCSP8202D-4CW2-F139BF39B has stable and clean flow control, and is a core spare part for semiconductor gas supply.

Product detailed pictures：

FCSP8202D-4CW2 -F139BF39B

product video

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