Brooks 002-7090-03 Atmospheric Wafer Robot  

Product Manual：

Brooks 002-7090-03 Atmospheric Wafer Robot
1. EFEM front-end atmospheric wafer handling manipulator
2. Clean body, low particle generation
3. Servo closed-loop, high positioning accuracy
4. Rotating telescopic arm, flexible operating range
5. Smooth movement, reducing wafer shaking
6. Collision detection, instant stop upon touch
7. Adapt to standard wafer loading and unloading operations
8. Can store multiple sets of motion process programs
9. Multi channel I/O docking door control sensor
10. Support communication between the bus and the overall controller
11. Built in wiring, minimal cable wear and tear
12. Support continuous production 24/7
13. Fault self check, retain error logs
14. Compact body, saving device space
15. Standard interface, easy replacement of spare parts
Brooks 002-7090-03 atmospheric wafer robot is a semiconductor front-end equipment responsible for wafer transfer between the wafer box and the cavity.

Product detailed pictures：

002-7090-03

product video

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