Брукс 002-7090-03 Atmospheric Wafer Robot

Руководство по продукту：

Брукс 002-7090-03 Atmospheric Wafer Robot
1. EFEM front-end atmospheric wafer handling manipulator
2. Чистое тело, low particle generation
3. Servo closed-loop, высокая точность позиционирования
4. Rotating telescopic arm, flexible operating range
5. Smooth movement, reducing wafer shaking
6. Collision detection, instant stop upon touch
7. Adapt to standard wafer loading and unloading operations
8. Can store multiple sets of motion process programs
9. Multi channel I/O docking door control sensor
10. Support communication between the bus and the overall controller
11. Built in wiring, minimal cable wear and tear
12. Support continuous production 24/7
13. Самодиагностика неисправности, retain error logs
14. Компактный корпус, saving device space
15. Стандартный интерфейс, легкая замена запасных частей
Брукс 002-7090-03 atmospheric wafer robot is a semiconductor front-end equipment responsible for wafer transfer between the wafer box and the cavity.

Подробные фотографии продукта：

002-7090-03

видео о продукте

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