Kashiyama NV60N-10 Semiconductor Dry Vacuum Pump  

Product Manual：

Kashiyama NV60N-10 Semiconductor Dry Vacuum Pump
1. Multi stage Roots dry oil-free structure, outputting clean rough vacuum
2. Stable pumping speed, used as a front-end pump in conjunction with molecular pumps
3. Air cooled heat dissipation, no need for cooling water, suitable for equipment layout
4. Equipped with gas stabilization function, capable of handling water vapor and some weakly corrosive gases
5. The rotor operates without contact and there are no worn parts inside
6. Low vibration amplitude reduces interference with precision semiconductor cavities
7. Built in air intake filter to block solid particles from entering the pump chamber
8. Equipped with anti backflow valve, stop the machine to avoid reverse contamination of the chamber by oil and gas

9. Support communication interface for remote reading of pump operation status and alarms
10. Compact overall structure, saving installation space inside the equipment
11. Industrial grade components that support long-term continuous operation of production lines
12. The cavity is corrosion-resistant and suitable for exhaust conditions in etching and coating processes
13. Fault self diagnosis, outputting fault codes for easy on-site troubleshooting
14. Long maintenance cycle, reducing the frequency of production line downtime and maintenance
15. Can be combined with various types of turbo molecular pumps to form a complete vacuum unit
Kashiyama NV60N-10 semiconductor dry vacuum pump, Kashiyama Industrial dry pump, provides stable pre stage rough vacuum for semiconductor vacuum chambers.

Product detailed pictures：

NV60N-10

product video

Other links

UDC920BE01 3BHE034863R0001 High Voltage Inverter
SZ4127.000 operation switch
UFC911B106 3BHE037864R0106 Control Board

Other links

PCIE-5565-PIORC PCIE-5565PIORC-100000 Reflective memory card
IDEC PF3S-PSA2 Output interface module
NI PXI-8423 Output interface module