Kashiyama NV60N-10 Semiconductor Dry Vacuum Pump
Руководство по продукту：
Kashiyama NV60N-10 Semiconductor Dry Vacuum Pump
1. Multi stage Roots dry oil-free structure, outputting clean rough vacuum
2. Stable pumping speed, used as a front-end pump in conjunction with molecular pumps
3. Отвод тепла с воздушным охлаждением, no need for cooling water, suitable for equipment layout
4. Equipped with gas stabilization function, capable of handling water vapor and some weakly corrosive gases
5. The rotor operates without contact and there are no worn parts inside
6. Low vibration amplitude reduces interference with precision semiconductor cavities
7. Built in air intake filter to block solid particles from entering the pump chamber
8. Equipped with anti backflow valve, stop the machine to avoid reverse contamination of the chamber by oil and gas
9. Support communication interface for remote reading of pump operation status and alarms
10. Compact overall structure, экономия места для установки внутри оборудования
11. Компоненты промышленного класса, обеспечивающие длительную непрерывную работу производственных линий.
12. The cavity is corrosion-resistant and suitable for exhaust conditions in etching and coating processes
13. Самодиагностика неисправностей, outputting fault codes for easy on-site troubleshooting
14. Длительный цикл обслуживания, reducing the frequency of production line downtime and maintenance
15. Can be combined with various types of turbo molecular pumps to form a complete vacuum unit
Kashiyama NV60N-10 semiconductor dry vacuum pump, Kashiyama Industrial dry pump, provides stable pre stage rough vacuum for semiconductor vacuum chambers.
Подробные фотографии продукта：
NV60N-10
видео о продукте
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