الطاقة المتقدمة 3153137-934 مصدر البلازما عن بعد
دليل المنتج：
الطاقة المتقدمة 3153137-934 مصدر البلازما عن بعد
بداية
الطاقة المتقدمة 3153137-934 is a remote plasma source specifically designed for the semiconductor industry, primarily used for chamber cleaning, exhaust gas treatment, and wafer surface pretreatment work.
lass=”yoast-text-mark” />>ميزات المنتج
High gas decomposition efficiency, uniform and stable cleaning effect of the chamber
Built in impedance matching device, low RF power transmission loss
The ignition is stable and can start normally even under cold working conditions
Adopting water-cooled heat dissipation method, supporting long-term continuous operation of equipment
The cavity has undergone anti-corrosion treatment and is resistant to various process chemicals and gases
Equipped with multiple safety protection functions for overheating, الجهد الزائد, and overload
Equipped with a universal communication interface, it can be connected to the upper system for remote control of parameters
Plasma remote action reduces damage to the inner wall of the cavity and particle generation
Compatible with multiple process gases and suitable for different semiconductor process scenarios
Equipped with running status monitoring function, it can quickly self check and troubleshoot faults
Integrated compact structure, easy and convenient on-site disassembly and replacement
Strong controllability of process parameters and excellent consistency in batch production
Sealed anti-static design to prevent static electricity from damaging internal precision components
Can effectively improve wafer processing yield and reduce equipment maintenance downtime
Widely adaptable to various semiconductor process equipment such as etching and thin film deposition
ملخص
الطاقة المتقدمة 3153137-934 remote plasma source has stable operation, excellent cleaning efficiency, and complete protection mechanism. It is an indispensable core spare part for cavity cleaning and exhaust gas treatment in the semiconductor production process, ensuring efficient and stable mass production of the production line.
صور مفصلة للمنتج：
3153137-934
فيديو المنتج
روابط أخرى
PFSK151 3BSE018876R1 3BSC980006R358控制模块
Schneider 140CPU31110PLC模块
Ge IS200DTAOH1ABA IS210DTAOH1AAPCB模块
روابط أخرى
ALSTOM 029.209.918 لوحة الدوائر المطبوعة (ثنائي الفينيل متعدد الكلور) Components
ALSTOM 029.221.719 وحدة التحكم
CONVERTEAM ALSTOM 029.232.603 Communication Board
