إيرا 3030-07404 جهاز التحكم بالتدفق الشامل
دليل المنتج：
Product Features of AERA 3030-07404 جهاز التحكم بالتدفق الشامل
إيرا 3030-07404 is used for precise flow control of process gases in semiconductor equipment
Thermal sensing detection, stable flow measurement with small errors
Closed loop rapid pressure regulation, no significant fluctuations in airflow switching
All metal sealed valve body, suitable for various corrosive process gases
Ultra low leakage design, reducing special gas losses
بنيت في حماية متعددة, automatic cut-off of gas supply for overpressure and overcurrent
سرعة الاستجابة السريعة, no delay in adjusting the start and stop of the cavity process
Support standard analog communication and interface with device control system
Temperature resistant components, suitable for long-term continuous operation in clean workshops
حجم صغير, space saving installation inside the pneumatic control box
VCR standard air circuit connector, من السهل تفكيك وإصلاح
Small zero drift, no need for frequent calibration for long-term use
Equipped with abnormal traffic alarm signal, quick fault identification
Internal precision filtration to prevent dust from blocking the valve passage
Unified specifications and sizes, MFC of the same model can be directly replaced
إيرا 3030-07404 mass flow controller is a specialized air flow control component for semiconductor coating and etching equipment
صور مفصلة للمنتج：
3030-07404
فيديو المنتج
روابط أخرى
مكس 979 ب-01-0013 وحدة الطاقة
محرك سيرفو الذكي METRONIX ARS-310/5UL
ميستو صمام ميستو NE724A
روابط أخرى
DSAO120A 3BSE018293R1 CPU control card
DSBC176 3BSE019216R1 control card
DSDI110AV1 3BSE018295R1 Control card
