AERA 3030-07404 Mass Flow Controller

Product Manual：

Product Features of AERA 3030-07404 Mass Flow Controller
AERA 3030-07404 is used for precise flow control of process gases in semiconductor equipment
Thermal sensing detection, stable flow measurement with small errors
Closed loop rapid pressure regulation, no significant fluctuations in airflow switching
All metal sealed valve body, suitable for various corrosive process gases
Ultra low leakage design, reducing special gas losses
Built in multiple protections, automatic cut-off of gas supply for overpressure and overcurrent

Fast response speed, no delay in adjusting the start and stop of the cavity process
Support standard analog communication and interface with device control system
Temperature resistant components, suitable for long-term continuous operation in clean workshops
Compact size, space saving installation inside the pneumatic control box
VCR standard air circuit connector, easy to disassemble and repair
Small zero drift, no need for frequent calibration for long-term use
Equipped with abnormal traffic alarm signal, quick fault identification
Internal precision filtration to prevent dust from blocking the valve passage
Unified specifications and sizes, MFC of the same model can be directly replaced
AERA 3030-07404 mass flow controller is a specialized air flow control component for semiconductor coating and etching equipment

Product detailed pictures：

3030-07404

product video

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