ضخم 0010-02977 RF Matcher

دليل المنتج：

Main features (15 points)
AMAT original PVD dedicated, compatible with Sub Zero BESC cavity, توافق قوي.
13.56MHz standard RF frequency, matched with mainstream semiconductor sputtering power supply.
Automatic impedance matching network, real-time dynamic tuning, millisecond level response.
50 Ω standard impedance, seamlessly integrated with RF power supply/cavity.
Maximum power processing of 3kW, meeting the requirements of high-power sputtering process.
Built in high-precision V/I sensor for precise monitoring of reflected power.
Closed loop stepper motor drive, automatic adjustment of variable capacitance, stable matching.
Low reflection design, suppresses standing waves, and protects the RF generator and cavity.
Vacuum chamber side installation, هيكل مدمج, simple wiring.
Industrial grade water-cooled heat dissipation, long-term stable operation under high power.
Multiple fault protection: الجهد الزائد, overcurrent, overheating, standing wave protection.
Compatible with Endura platform, specifically designed for PVD (TiN/Al/Cu) process.
Original factory spare parts standard, can be directly replaced, من السهل الحفاظ عليها.
All metal shielding, good EMI/RFI suppression, strong anti-interference.
Semiconductor FAB certification, cleanroom level adaptation, long lifespan.

صور مفصلة للمنتج：

0010-02977

فيديو المنتج

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