AMAT 0190-B2950 Programmable DC Controller
دليل المنتج:
Main features (15 simplified)
Semiconductor specific high-voltage DC, compatible with electrostatic chuck core power supply
Voltage/current fully programmable, flexible configuration of process parameters
Constant voltage/constant current automatic switching, adapted to different stages of load changes
Extremely low output ripple ensures stability of coating/etching process
Long line compensation technology reduces cable loss and stabilizes remote voltage
Multiple protection mechanisms, automatic power-off and alarm for faults
Multiple sets of process parameters are stored, maintained during power outages, and quickly recalled
Remote communication interface, supporting real-time monitoring and parameter setting of the host
Plug in modular design, easy disassembly and assembly, تقليل وقت التوقف عن العمل
Air cooling for efficient heat dissipation, 24/7 continuous operation without pressure
Industrial grade reinforcement, مضاد للاهتزاز, مكافحة التدخل الكهرومغناطيسي
LED status indicator, clear operation/malfunction at a glance
AMAT factory adaptation, directly replacing spare parts of the same series
تصميم موثوقية عالية, long-term verification of semiconductor production lines
Long life cycle support, original factory maintenance and calibration services
التطبيقات النموذجية
Semiconductor Etcher
PECVD deposition equipment
Electrostatic Chuck (ESC) High Voltage Power Supply
Vacuum chamber bias control
AMAT series equipment factory spare parts replacement
صور مفصلة للمنتج:

0190-B2950
فيديو المنتج
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