AMAT 0190-B2950 Programmable DC Controller

Руководство по продукту：

Основные особенности (15 simplified)
Semiconductor specific high-voltage DC, compatible with electrostatic chuck core power supply
Voltage/current fully programmable, flexible configuration of process parameters
Constant voltage/constant current automatic switching, adapted to different stages of load changes
Extremely low output ripple ensures stability of coating/etching process
Long line compensation technology reduces cable loss and stabilizes remote voltage
Multiple protection mechanisms, automatic power-off and alarm for faults
Multiple sets of process parameters are stored, maintained during power outages, and quickly recalled
Remote communication interface, supporting real-time monitoring and parameter setting of the host

Подключите модульную конструкцию, легкая разборка и сборка, сокращение времени простоя
Air cooling for efficient heat dissipation, 24/7 continuous operation without pressure
Industrial grade reinforcement, антивибрационный, анти-электромагнитные помехи
Светодиодный индикатор состояния, clear operation/malfunction at a glance
AMAT factory adaptation, directly replacing spare parts of the same series
Высокая надежность конструкции, long-term verification of semiconductor production lines
Long life cycle support, original factory maintenance and calibration services
Типичные применения
Semiconductor Etcher
PECVD deposition equipment
Electrostatic Chuck (ESC) High Voltage Power Supply
Vacuum chamber bias control
AMAT series equipment factory spare parts replacement

Подробные фотографии продукта：

0190-B2950

видео о продукте

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