AE 31550102-044 Controller Module
Product Manual：
AE 31550102-044 Controller Module
1. The internal control board of the RF power supply controls the RF power output logic
2. Slot type board, easy to plug, replace and maintain in the cabinet
3. Collect real-time process parameters such as power and reflected power
4. Multi channel IO interface, handling interlocking, alarm, and protection signals
5. Built in hardware protection logic for overcurrent, overheating, and mismatch
6. Local storage of fault records for easy troubleshooting
7. Bus communication, connecting to the upper computer to achieve remote control
8. Hardware watchdog, automatic reset for abnormal situations to ensure smooth operation
9. Optoelectronic isolation interface to suppress external electromagnetic interference
10. Soft start control to reduce power on surge current
11. 24VDC power supply, compatible with semiconductor equipment cabinets
12. Wide temperature operation, suitable for high temperature conditions inside the equipment
13. Three proof coating, moisture-proof, dustproof, vibration and impact resistant
14. Onboard indicator light, intuitive recognition of operational fault status
15. Compatible with AE series RF generator complete set
AE 31550102-044 controller module, RF equipment main control board, used for internal control of RF power supply in semiconductor plasma process
Product detailed pictures：
31550102-044
product video
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