AMAT 0010-30770 Vacuum Pump Valve
Product Manual：
AMAT 0010-30770 Vacuum Pump Valve
Introduction: AMAT 0010-30770 semiconductor equipment is equipped with a vacuum pump isolation valve, which is used to isolate the cavity from the vacuum pump and maintain a high vacuum environment.
Pneumatic drive structure, fast and stable switch action
High precision sealing structure, low leakage rate, isolating the chamber from the pump body
Dual position sensing feedback, real-time upload of valve opening and closing status
The valve body is made of stainless steel material and is resistant to process corrosive gases
Clean polishing treatment, low dust production, suitable for wafer technology
Power off self-locking structure, shutdown to prevent vacuum backflow from contaminating the chamber
Resistant to high and low temperature conditions, suitable for long-term operation and temperature rise of vacuum pumps
Standard flange interface, matched with AMAT equipment vacuum pump direct installation
Built in buffer structure, no impact on opening and closing to reduce seal wear
Fluorine rubber corrosion-resistant seal with long service life
Integrated signal wiring port, directly connected to the equipment master control
Seismic resistant internal structure, less prone to air leakage during machine vibration
The disassembly and assembly structure is simple, and the replacement and maintenance of seals are convenient
Adapt to vacuum piping systems for etching and deposition equipment
Factory vacuum leak detection and million cycle test qualified
Conclusion: AMAT 0010-30770 has reliable sealing and stable isolation, ensuring the vacuum cleanliness of the chamber and reducing process pollution and downtime maintenance.
Product detailed pictures：
0010-30770
product video
Other links
PCO 51303940-250 9967296 Fan Alarm Component
HONEYWELL SC-UCMX01 51307195-175 Hybrid I/O Module
Motorola MVME167-33B Industrial Control System
Other links
HONEYWELL CC-PCNT02 Analog module
CI546 3BSE012545R1 processor module
NI GPIB-140A totCI546 3BSE012545R1 processor module
NI GPIB-140A total line expander
KUC720AE01 3BHB003431R0001 3BHB000652R0001 moduleal line expander
