AMAT 0010-E8970 Controller  

Product Manual：

AMAT 0010-E8970 Controller
Introduction: AMAT 0010-E8970 is an original process control unit specifically designed for semiconductor equipment
Compatible with AMAT etching and deposition wafer process machines
Synchronous acquisition and control of multi-channel analog digital signals
High precision parameter adjustment, good process consistency
Built in multiple circuit filters, resistant to workshop electromagnetic interference
Standardized communication interface, connected to the main control system of the whole machine
Real time collection of chamber temperature, air pressure, RF and other working condition data
Equipped with built-in fault self check and quick alarm prompt for abnormalities

Support multiple sets of process program storage, one click switching of processes
Isolation of strong and weak electrical zones to reduce the risk of short circuit damage
High temperature resistant industrial components, stable operation for 7 × 24 hours
Standard rack installation size, easy disassembly and replacement
Reserved detection points for high on-site maintenance efficiency
Sealed dust-proof structure, suitable for clean wafer workshops
Original factory aging test with low operational failure rate
Equipped with upper computer software, parameter records are traceable
Conclusion: AMAT 0010-E8970 has high control accuracy and strong compatibility, and is a core spare part for semiconductor thin film manufacturing processes

Product detailed pictures：

0010-E8970

product video

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