AMAT 0010-E8970 Controller
Руководство по продукту：
AMAT 0010-E8970 Controller
Введение: AMAT 0010-E8970 is an original process control unit specifically designed for semiconductor equipment
Compatible with AMAT etching and deposition wafer process machines
Synchronous acquisition and control of multi-channel analog digital signals
High precision parameter adjustment, good process consistency
Built in multiple circuit filters, устойчив к электромагнитным помехам мастерской
Standardized communication interface, connected to the main control system of the whole machine
Real time collection of chamber temperature, air pressure, RF and other working condition data
Equipped with built-in fault self check and quick alarm prompt for abnormalities
Support multiple sets of process program storage, one click switching of processes
Isolation of strong and weak electrical zones to reduce the risk of short circuit damage
High temperature resistant industrial components, stable operation for 7 × 24 часы
Standard rack installation size, легкая разборка и замена
Reserved detection points for high on-site maintenance efficiency
Sealed dust-proof structure, suitable for clean wafer workshops
Original factory aging test with low operational failure rate
Equipped with upper computer software, parameter records are traceable
Заключение: AMAT 0010-E8970 has high control accuracy and strong compatibility, and is a core spare part for semiconductor thin film manufacturing processes
Подробные фотографии продукта：
0010-E8970
видео о продукте
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