AMAT 0015-09077 Throttle Valve Driver  

Product Manual：

AMAT 0015-09077 Throttle Valve Driver
Introduction: AMAT 0015-09077 is a semiconductor vacuum chamber matching throttle valve driving unit, which accurately adjusts the vacuum flow rate of the pipeline.
The valve opening adjustment response is sensitive and the flow control is precise
Closed loop feedback control, stable maintenance of chamber vacuum degree
Built in multiple protections against overcurrent, overload, and overheating
Industrial communication interface, capable of docking with equipment main control board
Small modular structure, space saving for machine installation
Anti electromagnetic interference, suitable for clean workshop working conditions
Long term continuous start stop operation, durable and not prone to malfunctions
Equipped with position self check and real-time feedback on valve position status

Standardized wiring terminals, easy disassembly and maintenance
Wide temperature working design, adapted to the internal environment of the equipment
Smooth torque output, valve opening and closing without jamming
Fault code prompt, quickly locate the fault point
Metal protective shell, dustproof and corrosion-resistant
Compatible with multiple AMAT deposition and etching vacuum equipment
Spare parts of the same model can be directly replaced without complex debugging
Conclusion: AMAT 0015-09077 has stable current control and easy maintenance, making it a commonly used driver spare part for semiconductor vacuum equipment.

Product detailed pictures：

0015-09077

product video

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