AMAT 0090-A7121 RF Controller

Product Manual：

AMAT 0090-A7121 is a radio frequency (RF) matching controller specifically designed for semiconductor devices using Applied Materials. It is used for impedance matching of plasma chambers in etching/deposition equipment and is a core component of the RF power supply subsystem.
core parameters
Model: 0090-A7121
Brand: AMAT (Applied Materials)
Type: RF Matcher Controller
Frequency: 13.56 MHz (semiconductor standard ISM band)
Power adaptation: 5 kW peak/3 kW continuous
Impedance range: 10-2000 Ω, automatic matching accuracy ± 0.1 Ω
Control mode: automatic tuning+manual fine-tuning, millisecond response
Power supply: DC 24 V ± 10%, power consumption<15 W
Interface: Dedicated backplane bus+RS-485, compatible with Modbus protocol
Cooling: Optional air/water cooling, suitable for clean room conditions
Environment: 0-60 ℃, compatible with Class 5 cleanrooms
Compatible devices: Endura/Ventura series PVD and etching machines

Product detailed pictures：

0090-A7121

product video

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