AMAT 0190-15553 Controller Module  

Product Manual：

AMAT 0190-15553
1. Control the RF power output of coating equipment
2. Real time monitoring of forward and reflected power values
3. Automatically matching cavity load to reduce power loss
4. Receive instructions from the upper computer to control start stop and parameters
5. Automatic protection shutdown in case of overload and high temperature fault
6. Adapt to the production process of metal film deposition on wafers
7. Anti workshop electromagnetic interference, stable operating signal
8. Modular structure, quick disassembly and replacement after damage
9. Adjust the output power in stages according to the process flow

10. Real time uploading of operational data to the entire machine control system
11. Stable working frequency ensures process consistency
12. Suitable for long-term continuous operation in dust-free workshops
13. Regularly check the wiring terminals and internal power devices
14. Support mass production and processing of 200mm and 300mm wafers
15. Ensure stable and normal excitation of plasma in the cavity
Summary: AMAT 0190-15553 is a dedicated control module for semiconductor coating equipment, which controls the RF working status, adapts to wafer production use, and facilitates maintenance and replacement.

Product detailed pictures：

0190-15553

product video

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