ОГРОМНЫЙ 0190-15553 Модуль контроллера
Руководство по продукту：
ОГРОМНЫЙ 0190-15553
1. Control the RF power output of coating equipment
2. Мониторинг в реальном времени значений прямой и отраженной мощности
3. Automatically matching cavity load to reduce power loss
4. Receive instructions from the upper computer to control start stop and parameters
5. Automatic protection shutdown in case of overload and high temperature fault
6. Adapt to the production process of metal film deposition on wafers
7. Anti workshop electromagnetic interference, stable operating signal
8. Модульная структура, quick disassembly and replacement after damage
9. Adjust the output power in stages according to the process flow
10. Real time uploading of operational data to the entire machine control system
11. Stable working frequency ensures process consistency
12. Suitable for long-term continuous operation in dust-free workshops
13. Regularly check the wiring terminals and internal power devices
14. Support mass production and processing of 200mm and 300mm wafers
15. Ensure stable and normal excitation of plasma in the cavity
Краткое содержание: ОГРОМНЫЙ 0190-15553 is a dedicated control module for semiconductor coating equipment, which controls the RF working status, adapts to wafer production use, and facilitates maintenance and replacement.
Подробные фотографии продукта：
0190-15553
видео о продукте
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