AMAT 0190-54600 Control Unit Turbopump
Product Manual：
AMAT 0190-54600 Control Unit Turbopump
1. AMAT 0190-54600 is a specialized turbo pump drive control unit for semiconductor equipment
2. Closed loop speed regulation, stable control of high-speed operation of turbo molecular pump
3. Support soft start and soft stop to reduce mechanical impact losses of the pump body
4. Real time collection of multiple sets of operating parameters including speed, temperature, and current
5. RS485 communication interface, connected to the main control system of semiconductor equipment
6. Equipped with multiple hardware protection mechanisms for overcurrent, overheating, and overspeed
7. Fault code output for quick troubleshooting of equipment abnormalities
8. Built in cooling fan ensures stable heat dissipation under high load conditions
9. Panel status indicator light, providing intuitive feedback on operational alarm status
10. Suitable for AMAT series etching and thin film process vacuum chambers
11. Relay signal output, realizing equipment interlocking linkage control
12. Industrial grade shell structure, resistant to workshop dust electromagnetic interference
13. Support remote start stop control and adapt to automated production line processes
14. Can run continuously for a long time without interruption, meeting the needs of mass production
15. AMAT 0190-54600 supports matching corresponding models of turbo molecular pumps
AMAT 0190-54600 control unit turbo pump, used for semiconductor process equipment, drives turbo molecular pumps, completes chamber high vacuum establishment and state monitoring.
Product detailed pictures：
0190-54600
product video
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