ОГРОМНЫЙ 0190-54600 Блок управления Турбонасос
Руководство по продукту：
ОГРОМНЫЙ 0190-54600 Блок управления Турбонасос
1. ОГРОМНЫЙ 0190-54600 is a specialized turbo pump drive control unit for semiconductor equipment
2. Closed loop speed regulation, stable control of high-speed operation of turbo molecular pump
3. Support soft start and soft stop to reduce mechanical impact losses of the pump body
4. Real time collection of multiple sets of operating parameters including speed, температура, and current
5. Интерфейс связи RS485, connected to the main control system of semiconductor equipment
6. Equipped with multiple hardware protection mechanisms for overcurrent, перегрев, and overspeed
7. Fault code output for quick troubleshooting of equipment abnormalities
8. Built in cooling fan ensures stable heat dissipation under high load conditions
9. Индикатор состояния панели, providing intuitive feedback on operational alarm status
10. Suitable for AMAT series etching and thin film process vacuum chambers
11. Relay signal output, realizing equipment interlocking linkage control
12. Industrial grade shell structure, resistant to workshop dust electromagnetic interference
13. Support remote start stop control and adapt to automated production line processes
14. Can run continuously for a long time without interruption, meeting the needs of mass production
15. ОГРОМНЫЙ 0190-54600 supports matching corresponding models of turbo molecular pumps
ОГРОМНЫЙ 0190-54600 control unit turbo pump, used for semiconductor process equipment, drives turbo molecular pumps, completes chamber high vacuum establishment and state monitoring.
Подробные фотографии продукта：
0190-54600
видео о продукте
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