ASTeX AX3060-14 RF Matcher
Product Manual：
ASTeX AX3060-14 RF Matcher
1. ASTeX AX3060-14 Semiconductor Plasma RF Automatic Matcher
2. Automatic impedance adjustment, matching chamber plasma load
3. Reduce reflected power and protect RF power supply
4. Quick tuning to adapt to dynamic changes in process impedance
5. Built in power detection, collecting incident reflected power
6. Water cooling and heat dissipation, suitable for high-power working conditions
7. Hardware overcurrent and temperature protection, fault alarm output
8. Communication interface docking device master control
9. Compact module, easy to install on the cavity side
10. Anti plasma sputtering, extending service life
11. Support the use of etching and thin film process cavities
12. Process formula call, memory matching parameters
13. Can operate continuously for 7 x 24 hours in mass production
14. Output fault codes for easy maintenance and troubleshooting
15. ASTeX AX3060-14 is compatible with microwave/radio frequency plasma systems
ASTeX AX3060-14 RF Matcher is used in semiconductor process equipment to achieve impedance matching between RF power supply and vacuum chamber plasma load, stabilizing plasma discharge.
Product detailed pictures：
AX3060-14
product video
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