Brookhaven E22000032 Atmospheric Transport Robot
Product Manual：
Brookhaven E22000032 Atmospheric Transport Robot
1. Semiconductor wafer atmospheric environment multi joint handling manipulator
2. Multi axis servo drive, smooth motion trajectory and fast response
3. High repeatability positioning accuracy ensures wafer transfer alignment
4. Single arm telescopic rotating structure, suitable for narrow spaces inside the machine
5. Cleanroom level design to reduce particle contamination of wafers
6. Specialized wafer end gripper to prevent fragments and scratches
7. Support loading and unloading of multiple wafers and docking with FOUP carrier boxes
8. Built in collision detection, quick stop protection in case of touch
9. Fault self diagnosis, outputting alarm codes for easy maintenance
10. Support device main control bus communication and machine linkage operation
11. Programmable motion parameters, suitable for multiple workstation processes
12. Vibration suppression design, high-speed operation of wafers without deviation
13. Equipped with dual limits of software and hardware to avoid mechanical collisions
14. Industrial grade hardware that meets the 24-hour continuous operation of the production line
15. Mostly used for etching PVD、 Adhesive coating and developing machine wafer transfer
Brookhaven E22000032 atmospheric transfer robot is an internal wafer atmospheric handling unit in semiconductor machines, which completes the automatic transfer of wafers between the wafer carrier and the process station.
Product detailed pictures：
E22000032
product video
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