COHERENT 1079014 Semiconductor Equipment
Product Manual：
COHERENT 1079014 laser power sensing module is compatible with semiconductor plasma, coating, and etching RF cavity equipment.
1. Thermopile wide spectrum detection, 190nm-11 μ m coverage with ultraviolet to infrared process laser
2. Linear high-precision power detection, real-time feedback of stable laser output power for plasma technology
3. Built in photoelectric isolation filter to suppress distortion of workshop RF and electromagnetic clutter signals
4. A standard 10mm photosensitive target surface, suitable for installation and positioning of various machine optical paths
5. High damage threshold absorption coating, resistant to continuous laser irradiation and not easily ablated
6. Independent hardware protection, automatic interlocking shutdown triggered by over temperature and over power
7. DB25 gold-plated communication interface, long-term plugging and unplugging without oxidation virtual connection
8. Fast 2-second response speed, closed-loop real-time correction of sedimentation process parameters
9. Passive fanless heat dissipation, dust-free sealing suitable for clean semiconductor production lines
10. Specialized moisture-proof solder mask substrate, dust-proof and corrosion-resistant, extending service life
11. Integrated heat sink with controllable temperature rise and small drift during long-term full load operation
12. Factory ISO17025 standard calibration, measurement data can be traced back to the process
13. Standard fixed installation hole position, can be directly replaced without modifying the optical path bracket
14. Compatible with INFICON and AE RF power host communication protocols
15. Modular split structure, separate replacement of fault probes to reduce downtime
COHERENT 1079014 accurately monitors laser output power to ensure consistency between thin film deposition and etching processes.
Product detailed pictures：
product video
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