Comdel FP7526RB RF power supply
Product Manual：
Comdel FP7526RB RF power supply
1. Specialized RF power generation unit for semiconductor plasma process
2. Closed loop power control, stable output power, high power regulation accuracy
3. Built in standing wave detection, automatic power reduction protection for abnormal load
4. Real time monitoring of forward and reflected power, feedback of plasma state in the cavity
5. Supports continuous and pulse output modes, suitable for etching thin film processes
6. Equipped with multiple hardware safety protections against overheating, over power, and over current
7. Good harmonic suppression effect, reducing process plasma disturbance
8. Rack drawer structure, suitable for equipment cabinet slot installation
9. Air cooled cooling solution, supporting 7 × 24-hour uninterrupted production operation
10. Support bus communication and remotely set power parameters with the main control of the docking machine
11. Store operational data and fault logs for easy fault tracing and troubleshooting
12. Status indicator light, quickly identify abnormal power operation on site
13. Alarm signal output, can be connected to the whole machine safety interlock circuit
14. Anti electromagnetic interference, suitable for complex electromagnetic environments in semiconductor workshops
15. Standardization of RF and control interfaces, convenient disassembly and replacement of spare parts
Comdel FP7526RB RF power supply provides RF energy to the process chamber, ionizes the process gas to generate plasma, and is used for semiconductor etching and thin film processing processes.
Product detailed pictures：
FP7526RB
product video
Other links
3EC16124AA extender module
3DH04175AAAA transmitter module
3CM02148AAE02 Shelf Management Board
Other links
PPC322BE HIEE300900R1 Control card
1747-L552 Programmable module
1756-CNB Communication module
