Daihen AMN-50E6-V RF Matching Module
Product Manual：
Daihen AMN-50E6-V RF Matching Module
Introduction: Daihen AMN-50E6-V is a specialized 60MHz 5kW automatic RF matching module for semiconductor etching equipment, suitable for use in TEL process chambers.
Supports 60MHz frequency band, rated 5kW high-power output
Fast automatic impedance adjustment to reduce RF reflection power
Standard 50 Ω impedance matching, stable plasma ignition
Built in precision adjustable capacitor, high matching accuracy
Integrated air-cooled heat dissipation, less prone to overheating during full load operation
Real time monitoring of forward and reflected power values
Multiple protections against over power, over temperature, and short circuit
Digital communication interface, connected to the overall control system of the machine
Copper RF channel with lower RF loss
Strong electromagnetic shielding, suitable for clean workshop conditions
Standard rack mounted installation, easy disassembly and maintenance
24-hour uninterrupted mass production and stable operation
Equipped with fault self check and automatic alarm recording for abnormalities
Original factory program adapted to TEL series semiconductor equipment
Same model spare parts are universal and easy to replace on site
Conclusion: Daihen AMN-50E6-V has high matching efficiency, durability and stability, and is a core RF spare part for semiconductor thin film and etching production lines.
Product detailed pictures：
AMN-50E6-V
product video
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