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Home Others Edwards 8135928G003XS Low Temperature Compressor
Kawasaki 0190-25866 Robot Main Controller
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Edwards PT66-1Z-000 Semiconductor Turbomolecular Pump
Edwards PT66-1Z-000 Semiconductor Turbomolecular Pump

Edwards 8135928G003XS Low Temperature Compressor

Model: 8135928G003XS
Product status: New/Used
Warranty period: 365 days
Structural form: Other (specific form may vary depending on application)
Please contact Linda for a quote, thank you!

Category: Others Tags: 8135928G003XS, 8135928G003XS Numerical Technical Manual
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  • Description
Description

Edwards 8135928G003XS Low Temperature Compressor  

Product Manual:

#Edwards 8135928G003XS Low Temperature Compressor

1. Constructing an ultra-high vacuum environment with Edward cryogenic pump
2. Low temperature pumping matching for semiconductor ion implantation machine cavity
3. Low temperature cooling cycle supply for wafer PVD coating equipment
4. Vacuum cold trap cooling drive for electron beam detection equipment
5. Scanning electron microscope, mass spectrometer with built-in low-temperature system matching
6. Space simulation module with ultra-high vacuum refrigeration compression
7. Photovoltaic coating process chamber water vapor low-temperature adsorption refrigeration
8. Helium leak detector cold end low-temperature compression cycle operation

9. Third generation semiconductor process vacuum low-temperature unit matching
10. Low temperature vacuum testing of laboratory materials, refrigeration supply
11. Power source for vacuum chamber water vapor low-temperature capture device
12. Stable low-temperature operation and maintenance of chip packaging vacuum chamber
13. Optical coating machine with high cleanliness, vacuum and low temperature matching
14. Low temperature compression support for industrial vacuum degassing equipment
15. This Edwards 8135928G003XS low-temperature compressor supplies circulating high-pressure refrigerant to the low-temperature pump, creating a stable cryogenic environment and achieving efficient vacuum pumping
In summary, Edwards 8135928G003XS operates with minimal vibration and stable cooling, making it suitable for all-weather continuous operation in semiconductor high-purity vacuum production lines.

Product detailed pictures:

8135928G003XS

product video

https://www.module-dcs.com/wp-content/uploads/2026/08/8135928G003XS.mp4

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