HORIBA SEC-Z511X Mass Flow Controller

Product Manual：

HORIBA SEC-Z511X Mass Flow Controller
Introduction: Horiba SEC-Z511X Semiconductor Equipment Gas Flow Control Module
Accurate flow control and stable numerical values
Fast response speed, no significant fluctuations in flow regulation
Stainless steel metal seal for gas path, corrosion-resistant and low leakage
Supports multiple process gases, with adjustable range on site
Digital and analog dual communication, convenient for connecting device controllers
Standard VCR air port, easy to disassemble and replace
Adapt to the fluctuating gas supply pressure environment of the production line

Equipped with flow feedback, real-time monitoring of gas supply status
Shielded shell, not affected by electromagnetic interference in the workshop
Equipped with pressure anomaly self check alarm function
Compact body, convenient for dense installation of gas cabinets
Can work continuously and stably for 24 hours for a long time
Built in control valve, quick opening and closing, good sealing performance
Small linear error, uniform control of large and small flow segments
Used for gas supply in wafer processes such as etching and coating
Conclusion: HORIBA SEC-Z511X has stable and reliable gas control, and is a commonly used flow spare part in semiconductor processes

Product detailed pictures：

SEC-Z511X

product video

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