Регулятор массового расхода HORIBA SEC-Z511X

Руководство по продукту：

Регулятор массового расхода HORIBA SEC-Z511X
Введение: Horiba SEC-Z511X Semiconductor Equipment Gas Flow Control Module
Accurate flow control and stable numerical values
Быстрая скорость ответа, no significant fluctuations in flow regulation
Stainless steel metal seal for gas path, corrosion-resistant and low leakage
Supports multiple process gases, with adjustable range on site
Digital and analog dual communication, convenient for connecting device controllers
Standard VCR air port, легко разобрать и заменить
Adapt to the fluctuating gas supply pressure environment of the production line

Equipped with flow feedback, real-time monitoring of gas supply status
Shielded shell, not affected by electromagnetic interference in the workshop
Equipped with pressure anomaly self check alarm function
Компактный корпус, convenient for dense installation of gas cabinets
Can work continuously and stably for 24 часы в течение длительного времени
Built in control valve, quick opening and closing, good sealing performance
Small linear error, uniform control of large and small flow segments
Used for gas supply in wafer processes such as etching and coating
Заключение: HORIBA SEC-Z511X has stable and reliable gas control, and is a commonly used flow spare part in semiconductor processes

Подробные фотографии продукта：

SEC-Z511X

видео о продукте

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