INFICON NISEE3110 Controller
Product Manual：
The INFICON NISEE3110 controller is compatible with semiconductor coating and vacuum process equipment.
1. High precision crystal oscillator film thickness detection, precise control of film deposition rate
2. Multi channel sensing input, synchronously collecting multiple vacuum and process signals
3. Built in signal isolation filtering to resist electromagnetic interference in the workshop
4. Support storage of multiple coating process formulas, easy switching
5. Real time thickness closed-loop control, automatic correction of sedimentation parameters
6. Rich communication interfaces, connect with the machine’s main control system to upload data
7. Wide temperature industrial body, suitable for chamber cold and hot cycle working conditions
8. Fanless cooling structure, dust-proof and suitable for dust-free workshops
9. Multiple circuit protection, automatic protection against overvoltage and short circuit shutdown
10. Color display panel, intuitive viewing of operating parameters
11. Original factory standard installation dimensions, no equipment changes required for replacement
12. Modular internal components, separate replacement and repair for faults
13. Comes with process log records for easy process traceability and analysis
14. Matched with INFICON vacuum detection sensor accessories, strong compatibility
15. Full process precision calibration at the factory, stable long-term operation error
The INFICON NISEE3110 controller precisely controls the thin film process, ensuring consistency in wafer production processes.
Product detailed pictures：
NISEE3110
product video
Other links
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Other links
1C31194G01 analog output module
AIM0006 2RCA021397A0001F Sequential control card
COM0003 2RAA005844A0006A Sequential control card
