Контроллер INFICON NISEE3110

Руководство по продукту：

The INFICON NISEE3110 controller is compatible with semiconductor coating and vacuum process equipment.
1. High precision crystal oscillator film thickness detection, precise control of film deposition rate
2. Multi channel sensing input, synchronously collecting multiple vacuum and process signals
3. Built in signal isolation filtering to resist electromagnetic interference in the workshop
4. Support storage of multiple coating process formulas, easy switching
5. Real time thickness closed-loop control, automatic correction of sedimentation parameters
6. Богатые интерфейсы связи, connect with the machine’s main control system to upload data
7. Wide temperature industrial body, suitable for chamber cold and hot cycle working conditions

8. Fanless cooling structure, dust-proof and suitable for dust-free workshops
9. Многоконтурная защита, automatic protection against overvoltage and short circuit shutdown
10. Color display panel, intuitive viewing of operating parameters
11. Original factory standard installation dimensions, no equipment changes required for replacement
12. Modular internal components, separate replacement and repair for faults
13. Comes with process log records for easy process traceability and analysis
14. Matched with INFICON vacuum detection sensor accessories, сильная совместимость
15. Full process precision calibration at the factory, stable long-term operation error
The INFICON NISEE3110 controller precisely controls the thin film process, ensuring consistency in wafer production processes.

Подробные фотографии продукта：

NISEE3110

видео о продукте

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