Kawasaki 1000-760-01 Semiconductor Robot Controller  

Product Manual：

Kawasaki 1000-760-01 Semiconductor Robot Controller
1. Specially designed for Kawasaki wafer handling robotic arm with drive control
2. Multi axis servo closed-loop control, high motion positioning accuracy
3. Adapt to cleanroom conditions and meet semiconductor production standards
4. Support dual arm collaborative operation to improve wafer transfer efficiency
5. Built in collision detection, servo stop protection upon touch
6. Support AS robot programming language, easy to teach and debug
7. High speed bus for real-time data exchange with the robotic arm body

8. Multiple sets of I/O points, docking machine FOUP and cavity signals
9. Ethernet communication, capable of connecting to the main control system of semiconductor equipment
10. Optimization of motion curve to reduce the risk of wafer shaking
11. Store multiple sets of process programs, which can be quickly switched and called
12. Double safety circuit, reliable emergency stop safety protection
13. Fault self diagnosis, recording alarm codes for easy troubleshooting
14. Rack mounted installation, suitable for equipment cabinet space
15. Modular hardware, easy disassembly and replacement of spare parts
Kawasaki 1000-760-01 semiconductor robot controller controls all motion logic of wafer handling robots to ensure safe wafer flow in semiconductor production lines.

Product detailed pictures：

1000-760-01

product video

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