KAWASAKI 30D65K-C212 Robot Controller  

Product Manual：

KAWASAKI 30D65K-C212 Robot Controller
1. Kawasaki Semiconductor Wafer Handling Robot Special Control Unit
2. Multi axis servo closed-loop drive achieves high-precision repetitive positioning
3. Support dual arm collaborative control to improve wafer handling and circulation efficiency
4. Built in collision detection, servo stop protection for wafers upon touch
5. Compatible with Kawasaki robot programming language, easy to teach and debug
6. High speed internal bus for real-time data exchange with the robotic arm body
7. Multiple I/O ports, compatible with FOUP, cavity door and various sensor signals

8. Ethernet communication, connected to the main control system of semiconductor machines for linkage
9. Optimize motion curve to reduce high-speed wafer jitter
10. Can store multiple sets of process programs and support quick switching and calling
11. Independent safety emergency stop circuit, equipment operation is safe and reliable
12. Fault self diagnosis function, retaining alarm codes for easy troubleshooting
13. Rack mounted cabinet installation, adapted to the internal space layout of equipment
14. Excellent heat dissipation performance, meeting 7 × 24-hour mass production operation
15. Modular hardware design, easy disassembly and replacement of spare parts
KAWASAKI 30D65K-C212 robot controller controls all the motion logic of the wafer manipulator, ensuring safe and efficient transfer of wafers on the semiconductor production line.

Product detailed pictures：

30D65K-C212

product video

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