Kawasaki 3NT520B-A044 wafer handling and transfer robot  

Product Manual：

Kawasaki 3NT520B-A044 Wafer Handling and Transfer Robot
1. Dual arm structure, capable of alternately completing wafer picking and placing operations
2. Cleanroom grade, suitable for use in semiconductor dust-free workshops
3. High repeat positioning accuracy, protecting the wafer from collision
4. Smooth motion trajectory reduces the risk of wafer shaking
5. Big arm extension, capable of docking multiple FOUP wafer boxes
6. High speed handling to improve wafer circulation efficiency
7. Built in collision detection, stop immediately in case of touch
8. Servo closed-loop control, stable multi axis coordinated motion
9. Support machine communication and interface with semiconductor equipment master control

10. Low particle volatilization to avoid contaminating the wafer surface
11. Support fault self diagnosis and output abnormal alarm information
12. Floor standing installation, occupying less workshop space
13. Compatible with 300mm wafer handling operations
14. Long term continuous operation to meet mass production conditions
15. Standardized interface, convenient disassembly and replacement of spare parts
Kawasaki 3NT520B-A044 wafer handling and transfer robot, a specialized clean robotic arm for semiconductor equipment, is responsible for wafer transfer between wafer boxes and process chambers.

Product detailed pictures：

3NT520B-A044

product video

Other links

622-8868-001 Communication Module
PS-126W-AC power module
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Other links

REF542PLUS 1VCR007346 Operation panel
XVC767AE102 3BHB007209R0102 Control card
XVC768102 3BHB007211R102 Circuit board