Kawasaki 3NT520B-A044 wafer handling and transfer robot
Руководство по продукту：
Kawasaki 3NT520B-A044 Wafer Handling and Transfer Robot
1. Dual arm structure, capable of alternately completing wafer picking and placing operations
2. Cleanroom grade, suitable for use in semiconductor dust-free workshops
3. High repeat positioning accuracy, protecting the wafer from collision
4. Smooth motion trajectory reduces the risk of wafer shaking
5. Big arm extension, capable of docking multiple FOUP wafer boxes
6. High speed handling to improve wafer circulation efficiency
7. Built in collision detection, stop immediately in case of touch
8. Servo closed-loop control, stable multi axis coordinated motion
9. Support machine communication and interface with semiconductor equipment master control
10. Low particle volatilization to avoid contaminating the wafer surface
11. Support fault self diagnosis and output abnormal alarm information
12. Floor standing installation, occupying less workshop space
13. Compatible with 300mm wafer handling operations
14. Long term continuous operation to meet mass production conditions
15. Стандартизированный интерфейс, convenient disassembly and replacement of spare parts
Kawasaki 3NT520B-A044 wafer handling and transfer robot, a specialized clean robotic arm for semiconductor equipment, is responsible for wafer transfer between wafer boxes and process chambers.
Подробные фотографии продукта：
3NT520B-A044
видео о продукте
Другие ссылки
622-8868-001 Модуль связи
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