ЛАМ 02-405890-00 Digital Dynamic Controller
Руководство по продукту：
ЛАМ 02-405890-00 Digital Dynamic Controller
Введение: ЛАМ 02-405890-00 is a dedicated process control module for etching equipment, which controls various process parameters of the cavity.
Compatible with LAM etching equipment, original replacement parts
Multi channel synchronous control of air pressure, radio frequency, and pressure
Signal isolation design, resistant to plasma electromagnetic interference
High speed closed-loop regulation, stable etching process
Compatible with SECS/GEM and compatible with upper level systems
Equipped with indicator lights, the fault location is clear at a glance
Automatic self check upon startup, quick troubleshooting for abnormalities
Equipped with overvoltage, перегрев, and short circuit protection functions
Metal dustproof shell, suitable for dust-free workshops
Plug in installation of the whole machine, easy to replace
Local storage of multiple sets of production process formulas
Support online firmware upgrade without disassembling the device
Real time collection and recording of all production data
Standard interface, no need to change the wiring for direct installation and use
Durable industrial components reduce downtime for maintenance
Заключение: ЛАМ 02-405890-00 has stable control and is a core control spare part for etching equipment.
Подробные фотографии продукта：
02-405890-00
видео о продукте
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