VAT A-3000089 Integrated Pressure Controller  

Product Manual：

VAT A-3000089 Integrated Pressure Controller
Introduction: VAT A-3000089 semiconductor vacuum integrated pressure controller, matched with vacuum valve for precise control of chamber vacuum degree.
Built in PID closed-loop pressure control, minimal vacuum fluctuations, ensuring process stability
Integrated sensor and drive control, compact structure
Quick response pressure regulation to suppress pressure shock caused by air extraction/intake
Real time collection of vacuum values, uploading to the main control system of the equipment
Signal isolation circuit to resist RF and motor electromagnetic interference
Equipped with multiple safety interlock protections for overvoltage, over limit, and short circuit

Equipped with a fault indicator light, quickly locate vacuum abnormalities
Suitable for semiconductor etching, coating, and high-purity vacuum chambers
Metal dustproof and corrosion-resistant shell, meeting the standards of dust-free workshop
Standard industrial communication interface, supporting remote parameter setting
Wide temperature industrial components, long-term stable operation around the cavity
Integrated filtering circuit to eliminate pressure signal clutter and jitter
Standardized installation holes, no need to change wiring for disassembly and replacement
Low hysteresis control, good repeatability of repeated processes
Factory vacuum calibration aging, long-term stable accuracy during operation
Conclusion: VAT A-3000089 has precise pressure control and rapid response, making it a core pressure control spare part for semiconductor vacuum chambers.

Product detailed pictures：

A-3000089

product video

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