XEI 232260-01 Plasma Cleaner
Product Manual:
XEI 232260-01 plasma cleaner
Introduction: XEI 232260-01 is used for in-situ decarbonization of electron microscopy vacuum chambers
External hollow cathode electrode, no splashing particles contaminating the chamber
Low power RF excited plasma, high cleaning efficiency
Highly active free radicals for rapid removal of hydrocarbon organic impurities
Dry cleaning at room temperature without damaging the sample and mirror components
Direct ignition under high vacuum without the need for additional pre pumping chambers
Small integrated body, suitable for SEM/TEM equipment installation
Support two start stop control modes: panel and upper computer
Comes with built-in operation status and fault alarm signal output
Low heat operation, stable long-term continuous operation
Gas adaptation for argon oxygen process, environmentally friendly with no chemical waste liquid
Metal shielding shell, isolating electromagnetic interference imaging
Standard communication interface, capable of connecting to the entire machine control system
Simple and easy to maintain structure, convenient replacement of consumables
Suitable for various imported scanning and transmission electron microscopes
This XEI 232260-01 belongs to the Evactron series cavity cleaning unit
Conclusion: Maintain the cleanliness of the vacuum chamber, improve the clarity of electron microscopy imaging, XEI 232260-01 dedicated plasma cleaning spare parts
Product detailed pictures:

232260-01
product video
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