AMAT 0090-B8460 Robot Controller
Руководство по продукту：
AMAT 0090-B8460 Robot Controller
AMAT 0090-B8460 is a specialized robot controller for 300mm wafer semiconductor equipment in Applied Materials (ОГРОМНЫЙ), used for vacuum transfer EFEM/Load Port、 Process chamber wafer handling, compatible with AMAT original multi axis robotic arm.
1. Basic Information
Manufacturer: Applied Materials (ОГРОМНЫЙ)
Модель: 0090-B8460
Тип: Multi axis robot motion controller (vacuum/atmospheric transmission)
Suitable equipment: 300mm etching, deposition, ion implantation machine EFEM、 Vacuum transmission module
2. Hardware specifications
Processor: Multi core real-time CPU, VME bus architecture
Number of control axes: Up to 6 axes linked (rotation+line+wrist)
Источник питания: DC 24V ± 10%/AC 100-240V wide voltage input
Интерфейс связи:
Ethernet (TCP/IP, upper computer/PLC communication)
SERCOS III (servo bus, high-speed synchronization)
RS-232/485 (последовательный порт, sensor/IO expansion)
Digital I/O: 32 in/32 out (photoelectric isolation, limit/emergency stop/door interlock)
Structure: 19 inch standard rack mounted, metal dust-proof chassis
Среда: Temperature range of 5-45 ℃; Humidity 10% -90% RH (no condensation); Cleanroom Class 1 adaptation
3. Core functions
Multi axis synchronous control: high-speed and smooth trajectory planning for vacuum robotic arm, positioning accuracy ± 0.01mm
Wafer handling logic: picking/placing/pre alignment/anti-collision protection, suitable for thin and brittle 300mm wafers
Safety interlock: аварийная остановка, door interlock, soft limit, collision detection (dedicated for vacuum environment)
Real time monitoring and diagnosis: shaft status, температура, текущий, vacuum degree monitoring, fault code tracing
Teaching and Programming: Supports handheld teaching, offline programming, and program power-off saving
Подробные фотографии продукта：
0090-B8460
видео о продукте
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