Toyota R06-0402 Vacuum Drying Pump

Руководство по продукту：

Toyota R06-0402 Vacuum Drying Pump
1. Dry oil-free vacuum drying pump for semiconductor equipment
2. Oil free chamber structure to prevent oil vapor pollution of the process chamber
3. Stable pumping rate, suitable for chamber dry pumping conditions
4. Pump body anti-corrosion treatment, resistant to water vapor and slight process by-products
5. Встроенный отвод тепла с воздушным охлаждением, supporting long-term continuous production operation
6. Equipped with multiple safety protections against overcurrent, перегрев, и перегрузка
7. Vibration suppression optimization to reduce disturbance to precision machinery
8. Real time collection of speed, температура, and load operation data

9. The communication interface is complete and can be connected to the main control system of the machine
10. Выход сигнала тревоги, abnormal status uploaded to the entire machine control system
11. Anti dust accumulation, reducing internal blockage faults in the pump body
12. Modular pump assembly, удобная разборка и обслуживание на месте
13. Компактный корпус, saving installation space at the bottom of the equipment
14. Fault log storage for easy fault tracing and troubleshooting
15. Стандартизированный интерфейс, хорошая совместимость для замены запасных частей
The Toyota R06-0402 vacuum drying pump is used for dehumidification and drying of semiconductor chambers, as well as pre stage vacuuming, to ensure a clean and dry vacuum environment for the chamber.

Подробные фотографии продукта：

R06-0402

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