Toyota R06-0402 Vacuum Drying Pump
Руководство по продукту：
Toyota R06-0402 Vacuum Drying Pump
1. Dry oil-free vacuum drying pump for semiconductor equipment
2. Oil free chamber structure to prevent oil vapor pollution of the process chamber
3. Stable pumping rate, suitable for chamber dry pumping conditions
4. Pump body anti-corrosion treatment, resistant to water vapor and slight process by-products
5. Built in air-cooled heat dissipation, supporting long-term continuous production operation
6. Equipped with multiple safety protections against overcurrent, перегрев, и перегрузка
7. Vibration suppression optimization to reduce disturbance to precision machinery
8. Real time collection of speed, температура, and load operation data
9. The communication interface is complete and can be connected to the main control system of the machine
10. Alarm signal output, abnormal status uploaded to the entire machine control system
11. Anti dust accumulation, reducing internal blockage faults in the pump body
12. Modular pump assembly, convenient on-site disassembly and maintenance
13. Компактный корпус, saving installation space at the bottom of the equipment
14. Fault log storage for easy fault tracing and troubleshooting
15. Стандартизированный интерфейс, good compatibility for spare parts replacement
The Toyota R06-0402 vacuum drying pump is used for dehumidification and drying of semiconductor chambers, as well as pre stage vacuuming, to ensure a clean and dry vacuum environment for the chamber.
Подробные фотографии продукта：
R06-0402
видео о продукте
Другие ссылки
3FE00140AACA Fiber Optic Network Module
3HE00316AA CPU module
3AL98034AA Communication Module
Другие ссылки
HC-KFS23K-S49 motor module
IC693ACC323B Gas turbine module
IC698CRE040 combustion engine card
