Toyota R06-0402 Vacuum Drying Pump  

Product Manual：

Toyota R06-0402 Vacuum Drying Pump
1. Dry oil-free vacuum drying pump for semiconductor equipment
2. Oil free chamber structure to prevent oil vapor pollution of the process chamber
3. Stable pumping rate, suitable for chamber dry pumping conditions
4. Pump body anti-corrosion treatment, resistant to water vapor and slight process by-products
5. Built in air-cooled heat dissipation, supporting long-term continuous production operation
6. Equipped with multiple safety protections against overcurrent, overheating, and overload
7. Vibration suppression optimization to reduce disturbance to precision machinery
8. Real time collection of speed, temperature, and load operation data

9. The communication interface is complete and can be connected to the main control system of the machine
10. Alarm signal output, abnormal status uploaded to the entire machine control system
11. Anti dust accumulation, reducing internal blockage faults in the pump body
12. Modular pump assembly, convenient on-site disassembly and maintenance
13. Compact body, saving installation space at the bottom of the equipment
14. Fault log storage for easy fault tracing and troubleshooting
15. Standardized interface, good compatibility for spare parts replacement
The Toyota R06-0402 vacuum drying pump is used for dehumidification and drying of semiconductor chambers, as well as pre stage vacuuming, to ensure a clean and dry vacuum environment for the chamber.

Product detailed pictures：

R06-0402

product video

Other links

3FE00140AACA Fiber Optic Network Module
3HE00316AA CPU module
3AL98034AA Communication Module

Other links

HC-KFS23K-S49 motor module
IC693ACC323B Gas turbine module
IC698CRE040 combustion engine card