MKS T3BIA-27092 high-speed exhaust throttle valve  

Product Manual：

MKS T3BIA-27092 high-speed exhaust throttle valve
Introduction: MKS T3BIA-27092 semiconductor vacuum intelligent high-speed throttle valve, integrated drive control circuit, precise control of chamber exhaust pressure, suitable for thin film and etching vacuum production lines.
The valve body integrates control, drive, and communication circuits, without the need for external independent control modules
Direct drive high-speed motor, fully open to fully closed within 200ms, with rapid pressure regulation response
Built in self-tuning PID algorithm, with minimal pressure overshoot and stable reproducibility of process parameters
Dual channel compatible Baratron pressure sensor, wide range and high-precision closed-loop pressure control
The encoder provides real-time feedback on the valve plate opening and synchronously uploads position and pressure data
Support DeviceNet, RS232, analog multi class communication protocol docking with the main control
316 stainless steel valve body, corrosion-resistant, suitable for various process special gas environments

Standard chemical resistant seals, valve body can withstand up to 105 ℃ constant temperature working condition MKS
Built in surge and ESD filtering circuits, metal casing to resist electromagnetic interference
Equipped with dual control modes of pressure and position, supporting soft start to prevent turbulence and dust
Dual alarm relay output, instant feedback of fault signal in case of abnormal working conditions
Non volatile storage saves calibration parameters, no need to recalibrate after power failure and restart
High torque drive structure, longer service life under dust and corrosion conditions
Standard vacuum flange interface, easy to disassemble and maintain, compatible with various chambers
Factory vacuum leak detection and pressure control full inspection, capable of continuous and stable operation for 7 × 24 hours
Conclusion: MKS T3BIA-27092 has fast pressure regulation speed, high control accuracy, stable maintenance of chamber vacuum pressure, and reduces process fluctuations and downtime maintenance frequency.

Product detailed pictures：

T3BIA-27092

product video

Other links

HIMA F3226A Input Module
PCO 51303940-250 9967296 Fan Alarm Component
HONEYWELL SC-UCMX01 51307195-175 Hybrid I/O Module

Other links

5SHY3545L0016 3BHB019719R0101 High voltage module
GVC736BE101 5SXE06-0160 Thyristor module
IC698CPE020 Gas turbine module