MKS T3BIA-27092 Высокоскоростной выпускной дроссельный клапан
Руководство по продукту：
MKS T3BIA-27092 Высокоскоростной выпускной дроссельный клапан
Введение: MKS T3BIA-27092 semiconductor vacuum intelligent high-speed throttle valve, integrated drive control circuit, precise control of chamber exhaust pressure, suitable for thin film and etching vacuum production lines.
The valve body integrates control, drive, and communication circuits, without the need for external independent control modules
Direct drive high-speed motor, fully open to fully closed within 200ms, with rapid pressure regulation response
Built in self-tuning PID algorithm, with minimal pressure overshoot and stable reproducibility of process parameters
Dual channel compatible Baratron pressure sensor, wide range and high-precision closed-loop pressure control
The encoder provides real-time feedback on the valve plate opening and synchronously uploads position and pressure data
Support DeviceNet, RS232, analog multi class communication protocol docking with the main control
316 stainless steel valve body, устойчивый к коррозии, suitable for various process special gas environments
Standard chemical resistant seals, valve body can withstand up to 105 ℃ constant temperature working condition MKS
Built in surge and ESD filtering circuits, metal casing to resist electromagnetic interference
Equipped with dual control modes of pressure and position, supporting soft start to prevent turbulence and dust
Dual alarm relay output, instant feedback of fault signal in case of abnormal working conditions
Non volatile storage saves calibration parameters, нет необходимости выполнять повторную калибровку после сбоя питания и перезапуска
High torque drive structure, longer service life under dust and corrosion conditions
Standard vacuum flange interface, легко разбирать и обслуживать, compatible with various chambers
Factory vacuum leak detection and pressure control full inspection, capable of continuous and stable operation for 7 × 24 часы
Заключение: MKS T3BIA-27092 has fast pressure regulation speed, высокая точность управления, stable maintenance of chamber vacuum pressure, and reduces process fluctuations and downtime maintenance frequency.
Подробные фотографии продукта：
T3BIA-27092
видео о продукте
Другие ссылки
Модуль ввода HIMA F3226A
ПКО 51303940-250 9967296 Компонент сигнализации вентилятора
HONEYWELL SC-UCMX01 51307195-175 Гибридный модуль ввода-вывода
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